Method for presenting tactile sensation and device therefor

ABSTRACT

The tactile sense presentation device comprises: a plurality of first electrodes covered with an insulating film and arranged on a same plane; a plurality of second electrodes arranged on the plane with tops exposed to outside; and a control unit performing a first operation in parallel with a second operation, wherein the first operation is for applying temporally changing first voltages to a part of the plurality of first electrodes to generate electric fields which are changed by the part of the plurality of first electrodes, and the second operation is for applying temporally changing first electric currents to a part of the plurality of second electrodes to cause the electric currents to flow from the part of the plurality of second electrodes to second electrodes which are different from the part of the plurality of second electrodes via electric conductors.

TECHNICAL FIELD

The present disclosure relates to a method and a device for presenting atactile sense to an operator.

BACKGROUND ART

It has been widely accepted to control touch-enabled operating devicessuch as cellular phones and game consoles by touching a specific area ona touch panel mounted on a liquid crystal screen with a finger or astylus while viewing buttons and icons displayed on the screen.

However, the buttons and icons are merely displayed on the screen asimages and are not presented as tangible and tactile objects. Therefore,the operators are required to visually recognize the displayed positionsof the buttons and icons without having a real feeling of enteringinformation such as pressure and the like the operators usually feels inpressing a tangible button.

The method and apparatus for sensory stimulation described in PatentDocument 1 present a tactile sense to the operator by using anelectrostatic force. The tactile sense presentation device and the drivemethod for the device described in Patent Document 2 present a tactilesense to the operator by directly applying an electrical stimulus to askin surface.

PRIOR ART DOCUMENTS Patent Documents

-   Patent Document 1: JP 2009-87359 A-   Patent Document 2: JP 2005-85048 A

SUMMARY OF INVENTION Problems to be Solved by the Invention

The method and apparatus for sensory stimulation described in PatentDocument 1 form an electrode-finger-electrode circuit by generatingdifferent electric potentials in two plane electrodes arranged on thesurface of the sensory stimulation apparatus and having a fingerapproach the electrodes. With the electrostatic force generated betweenthe finger and the electrodes, the technology produces an imitationalsensory stimulation. However, since the stimulation caused by theelectrostatic force takes effect only on the finger surface, availabletactile senses are limited.

The tactile sense presentation device and the drive method for thedevice described in Patent Document 2 present tactile sense informationto the operator by having the operator place his finger on an electrodearray and applying an electric current to the skin in contact with theelectrode array to stimulate the sensory nerve on the finger. However,available tactile senses are limited also in the case of the stimulationcaused by the electric current application.

The present disclosure is intended to solve the above describedconventional problem, and it is an object of the invention to provide atactile sense presentation device capable of presenting elaboratetactile senses both by using electric current stimulation to present atactile sense and by using an electrostatic force to present a tactilesense.

Means for Solving the Problem

The present invention is made for the purpose of solving the aboveproblem. A tactile sense presentation device according to the presentdisclosure comprises:

a plurality of first electrodes covered with an insulating film andarranged on a same plane;

a plurality of second electrodes arranged on the plane with tops exposedto outside; and

a control unit performing a first operation in parallel with a secondoperation, wherein the first operation is for applying temporallychanging first voltages to a part of the plurality of first electrodesto generate electric fields which are changed by the part of theplurality of first electrodes, and the second operation is for applyingtemporally changing first electric currents to a part of the pluralityof second electrodes to cause the electric currents to flow from thepart of the plurality of second electrodes to second electrodes whichare different from the part of the plurality of second electrodes viaelectric conductors.

Effects of the Invention

The tactile sense presentation device according to the presentdisclosure is capable of presenting elaborate tactile senses byrealizing both of tactile sense presentation based on electric currentstimulation and tactile sense presentation based on an electrostaticforce without decreasing the effect of the electrostatic tactile sensepresentation which makes use of the electrostatic force.

BRIEF DESCRIPTION OF DRAWINGS

FIG. 1(1) is a plan view of a part of a tactile sense presentationdevice with a touch panel function according to a first embodiment ofthe present invention; FIG. 1(2) is a longitudinal sectional view of thetactile sense presentation device illustrated in FIG. 1(1) taken along aline “A-A”.

FIG. 2(1) is a diagram illustrating an example of the tactile sensepresentation device illustrated in FIG. 1(1) causing first electrodes tofunction as electrostatic tactile sense presenting electrodes; FIG. 2(2)is a diagram illustrating a drive waveform of a voltage generated by avoltage source; FIG. 2(3) is a local sectional view illustrating a stateof the first electrodes of the tactile sense presentation deviceillustrated in FIG. 2(1) having a finger placed on a top.

FIG. 3(1) is a diagram illustrating an example of the tactile sensepresentation device illustrated in FIG. 1(1) causing second electrodesto function as electric current tactile sense presenting electrodes;FIG. 3(2) is a diagram illustrating a drive waveform of an electriccurrent generated by a current source; FIG. 3(3) is a local sectionalview illustrating a state of the second electrodes of the tactile sensepresentation device illustrated in FIG. 3(1) having a finger placed on atop.

FIG. 4 is a diagram illustrating an example of the tactile sensepresentation device illustrated in FIG. 1(1) causing the firstelectrodes to function as touch sensors.

FIG. 5 is a diagram illustrating a configuration of a first electrode ofa tactile sense presentation device with a touch panel functionaccording to a second embodiment of the present invention.

FIG. 6(1) is a plan view of a part of a tactile sense presentationdevice with a touch panel function according to a third embodiment ofthe present invention; FIG. 6(2) is a longitudinal sectional view of thetactile sense presentation device illustrated in FIG. 6(1) taken along aline “A-A”.

FIG. 7(1) is a table showing combination patterns of electrodes whichcarry out both of an electric current tactile sense presenting functionand a touch sensor function; FIG. 7(2) is a table showing combinationpatterns of electrodes which carry out both of an electrostatic tactilesense presenting function and a touch sensor function.

FIG. 8 is a table showing coexisting combinations of a set of electriccurrent tactile sense presenting electrodes and touch sensor electrodesand a set of electrostatic tactile sense presenting electrodes and touchsensor electrodes, functions of which coexist in a space sharing manneror in a time sharing manner in the tactile sense presentation device asillustrated in FIG. 1 which has the electrostatic tactile sensepresenting electrodes and the electric current tactile sense presentingelectrodes arranged on a same plane.

FIG. 9 is a table showing coexisting combinations of a set of electriccurrent tactile sense presenting electrodes and touch sensor electrodesand a set of electrostatic tactile sense presenting electrodes and touchsensor electrodes, functions of which coexist in a space sharing manneror in a time sharing manner in the tactile sense presentation device asillustrated in FIG. 6 which has the electrostatic tactile sensepresenting electrodes and the electric current tactile sense presentingelectrodes arranged on different planes.

FIG. 10 shows a table indicating that the electric current tactile sensepresenting electrodes adopt a dimensionless matrix system, a passivematrix system, or an active matrix system, and a table indicating thatthe electrostatic tactile sense presenting electrodes adopt adimensionless matrix system, a passive matrix system, or an activematrix system.

FIG. 11 is a diagram illustrating a configuration of the tactile sensepresentation device which realizes a combination example of the tactilesense presenting electrodes.

FIG. 12(1) is a diagram illustrating the first electrodes of the tactilesense presentation device illustrated in FIG. 11 operating as theelectrostatic tactile sense presenting electrodes; FIG. 12(2) is adiagram illustrating the second electrodes of the tactile sensepresentation device illustrated in FIG. 11 operating as the electriccurrent tactile sense presenting electrodes.

FIG. 13 is a diagram illustrating a configuration of the tactile sensepresentation device which realizes a combination example of the tactilesense presenting electrodes.

FIG. 14(1) is a diagram illustrating the first electrodes of the tactilesense presentation device illustrated in FIG. 13 operating as the touchsensor electrodes or the electrostatic tactile sense presentingelectrodes; FIG. 14(2) is a diagram illustrating the second electrodesof the tactile sense presentation device illustrated in FIG. 13operating as the electric current tactile sense presenting electrodes.

FIG. 15A illustrates an outline of a manufacturing method of the tactilesense presentation device which has the electrostatic tactile sensepresenting electrodes and the electric current tactile sense presentingelectrodes arranged on a same plane in which both of the electriccurrent tactile sense presenting electrodes and the electrostatictactile sense presenting electrodes function as dedicated electrodes.

FIG. 15B illustrates an outline of a manufacturing method of the tactilesense presentation device which has the electrostatic tactile sensepresenting electrodes and the electric current tactile sense presentingelectrodes arranged on a same plane in which both of the electriccurrent tactile sense presenting electrodes and the electrostatictactile sense presenting electrodes function as dedicated electrodes,different from FIG. 15A in a position taken for the cross section.

FIG. 16A illustrates an outline of a manufacturing method of the tactilesense presentation device which has the electrostatic tactile sensepresenting electrodes and the electric current tactile sense presentingelectrodes arranged on a same plane in which both of the electriccurrent tactile sense presenting electrodes and the electrostatictactile sense presenting electrodes function as dedicated electrodes.

FIG. 16B illustrates an outline of a manufacturing method of the tactilesense presentation device which has the electrostatic tactile sensepresenting electrodes and the electric current tactile sense presentingelectrodes arranged on a same plane in which both of the electriccurrent tactile sense presenting electrodes and the electrostatictactile sense presenting electrodes function as dedicated electrodes,different from FIG. 16A in a position taken for the cross section.

FIG. 17A illustrates an outline of a manufacturing method of the tactilesense presentation device which has the electrostatic tactile sensepresenting electrodes and the electric current tactile sense presentingelectrodes arranged on different planes in which both of the electriccurrent tactile sense presenting electrodes and the electrostatictactile sense presenting electrodes function as dedicated electrodes.

FIG. 17B illustrates an outline of a manufacturing method of the tactilesense presentation device which has the electrostatic tactile sensepresenting electrodes and the electric current tactile sense presentingelectrodes arranged on different planes in which both of the electriccurrent tactile sense presenting electrodes and the electrostatictactile sense presenting electrodes function as dedicated electrodes,different from FIG. 17A in a position taken for the cross section.

FIG. 18A illustrates an outline of a manufacturing method of the tactilesense presentation device which has the electrostatic tactile sensepresenting electrodes and the electric current tactile sense presentingelectrodes arranged on different planes in which both of the electriccurrent tactile sense presenting electrodes and the electrostatictactile sense presenting electrodes function as dedicated electrodes.

FIG. 18B illustrates an outline of a manufacturing method of the tactilesense presentation device which has the electrostatic tactile sensepresenting electrodes and the electric current tactile sense presentingelectrodes arranged on different planes in which both of the electriccurrent tactile sense presenting electrodes and the electrostatictactile sense presenting electrodes function as dedicated electrodes,different from FIG. 18A in a position taken for the cross section.

MODES FOR CARRYING OUT THE INVENTION

The method and apparatus for sensory stimulation described in PatentDocument 1 enable tactile sense presentation based on an electrostaticforce. On the other hand, the tactile sense presentation device and thedrive method for the device described in Patent Document 2 enabletactile sense presentation based on electric current stimulation. On thecondition that the tactile sense presentation based on electric currentstimulation and the tactile sense presentation based on an electrostaticforce by the apparatus, the device, and the methods are incorporated ina tactile sense presentation device, simultaneous presentation of thesedifferent tactile senses of an indirect tactile sense caused by anelectrostatic force and a direct tactile sense caused by electriccurrent stimulation would be enabled. However, on the condition thattactile sense presenting electrodes using electric current stimulationare formed in the tactile sense presentation device using anelectrostatic force, a tactile sense presenting electrode layer using anelectrostatic force would be arranged on the rear of a tactile sensepresenting electrode layer using electric current stimulation across aninsulating film. In that case, the effect of the electrostatic tactilesense presentation inevitably declines.

Then, the present disclosure provides a tactile sense presentationdevice capable of presenting elaborate tactile senses by realizing bothof tactile sense presentation based on electric current stimulation andtactile sense presentation based on an electrostatic force withoutdecreasing the effect of the electrostatic tactile sense presentationwhich makes use of the electrostatic force.

Embodiments of the present invention will be described below withreference to the drawings.

First Embodiment 1.1. Configuration of the Tactile Sense PresentationDevice

FIG. 1(1) is a plan view of a part of a tactile sense presentationdevice 2 with a touch panel function according to a first embodiment ofthe present invention, and FIG. 1(2) is a longitudinal sectional view ofthe tactile sense presentation device 2 illustrated in FIG. 1(1) takenalong a line

In the tactile sense presentation device 2 illustrated in FIG. 1, firstelectrodes 101 are a plurality of electrostatic tactile sense presentingelectrodes 4 made of ITO (indium tin oxide) of 100 nm in thicknessarranged on a same plane. The first electrodes 101, each of which is apentagon four of which occupy approximately three quarters of a squareof side 0.8 mm, are laid out on a same plane at intervals of 1 mmbetween the centers of the squares and at intervals of 0.2 mm betweenthe electrodes.

Second electrodes 102 are a plurality of electric current tactile sensepresenting electrodes 6 made of ITO (indium tin oxide) of 100 nm inthickness arranged on the same plane. The second electrodes 102, each ofwhich is a square of side 0.8 mm, are laid out on the same plane atintervals of 2 mm between the centers of the squares and at a distanceof 0.2 mm from the first electrodes 101.

First extraction electrodes 103, which are arranged below the firstelectrodes 101, are a plurality of electrodes extracted in one directionof the plane. Second extraction electrodes 104, which are arranged belowthe first electrodes 101, are a plurality of electrodes extracted in adirection different from that of the first extraction electrodes 103.Both of the first and second extraction electrodes are made of ITO(indium tin oxide) of 100 nm in thickness and 50 μm in line width.

Third extraction electrodes 105, which are arranged below the secondelectrodes 102, are a plurality of electrodes extracted in one directionof the plane. Fourth extraction electrodes 106, which are arranged belowthe second electrodes 102, are a plurality of electrodes extracted in adirection different from that of the third extraction electrodes 105.Both of the third and fourth extraction electrodes are made of ITO(indium tin oxide) of 100 nm in thickness and 50 μm in line width.

An insulating film 107, which is an insulator made of glass arranged tocover the top of the first electrodes 101, is 1 μm thick on the surfaceof the first electrodes 101. A substrate 108 is an insulator made ofglass in contact with the bottoms of the first electrodes 101 and thesecond electrodes 102.

The plurality of first electrodes 101 have their bottoms electricallyconnected with the first extraction electrodes 103 or the secondextraction electrodes 104. Also, the plurality of second electrodes 102have their bottoms electrically connected with the third extractionelectrodes 105 or the fourth extraction electrodes 106.

As will be described below, the tactile sense presentation device 2illustrated in FIG. 1(1) causes the first electrodes 101 to function aselectrostatic tactile sense presenting electrodes, causes the secondelectrodes 102 to function as electric current tactile sense presentingelectrodes, and further causes the first electrodes 101 to function astouch sensor electrodes.

The tactile sense presentation device 2 according to the embodimentadopts a passive matrix system. As a result, the tactile sensepresentation device 2 can select the first electrodes 101 to be causedto function as the electrostatic tactile sense presenting electrodesfrom among the plurality of first electrodes 101 by the unit of thefirst extraction electrode 103 or by the unit of the second extractionelectrode 104.

Also, the tactile sense presentation device 2 can select the secondelectrodes 102 to be caused to function as the electric current tactilesense presenting electrodes from among the plurality of secondelectrodes 102 by the unit of the third extraction electrode 105 or bythe unit of the fourth extraction electrode 106.

Further, the tactile sense presentation device 2 can select the firstelectrodes 101 to be caused to function as the touch sensor electrodesfrom among the plurality of first electrodes 101 by the unit of thefirst extraction electrode 103 or by the unit of the second extractionelectrode 104.

A control unit of the tactile sense presentation device 2 causes thefirst electrodes 101 to function as the electrostatic tactile sensepresenting electrodes and the touch sensor electrodes in a time sharingmanner. The control unit is implemented by a data processing unit to bedescribed later.

It is needless to say that the size of the electrodes and the pitches toarrange the electrodes are merely examples and other sizes and pitchesmay be used.

1.2. Electrostatic Tactile Sense Presenting Operation of The TactileSense Presentation Device

FIG. 2(1) is a diagram illustrating an example of the tactile sensepresentation device 2 illustrated in FIG. 1(1) causing the firstelectrodes 101 to function as the electrostatic tactile sense presentingelectrodes. In the tactile sense presentation device 2 illustrated inFIG. 2(1), a part of the first electrodes 101 are used as positiveelectrostatic interaction electrodes 111 whereas a part of the rest ofthe first electrodes 101 are used as negative electrostatic interactionelectrodes 112. A prescribed voltage is applied to the positiveelectrostatic interaction electrodes 111.

FIG. 2(3) is a local sectional view illustrating a state of the firstelectrodes 101 of the tactile sense presentation device 2 illustrated inFIG. 2(1) having a finger placed on the top. As illustrated in FIG.2(3), since the insulating film 107 is formed to cover the top of thepositive electrostatic interaction electrodes 111 and the negativeelectrostatic interaction electrodes 112, a dielectric 110 such as ahuman finger is placed on the insulating film 107. A voltage source 113is configured between the positive electrostatic interaction electrodes111 and the negative electrostatic interaction electrodes 112.

FIG. 2 (2) is a diagram illustrating a drive waveform of a voltagegenerated by the voltage source 113. The voltage source 113 applies apositive voltage to the positive electrostatic interaction electrode 111and a negative voltage to the negative electrostatic interactionelectrode 112. In response to the application, an opposite electricfields are induced in the dielectric (finger) 110 across the insulatingfilm 107. Specifically, a negative charge is induced in a part facingthe positive electrostatic interaction electrode 111 and a positivecharge is induced in a part facing the negative electrostaticinteraction electrode 112. As a result, electrostatic forces areproduced between one charge of the dielectric (finger) 110 and thepositive electrostatic interaction electrode 111 and between anothercharge of the dielectric (finger) 110 and the negative electrostaticinteraction electrode 112, so that the dielectric (finger) 110experiences the electrostatic forces in the directions of theelectrostatic interaction electrodes 111 and 112. As the voltage of thevoltage source 113 temporally changes, the electrostatic forceexperienced by the dielectric (finger) 110 changes, and therefore, thedielectric (finger) 110 feels a vibration on its surface.

Usually, while a finger is being moved along a surface of an object, thefinger catches a vibration from the roughness of the object surface andfeels a tactile sense such as granularity or smoothness according to thestrength and the frequency of the vibration. The tactile sensepresentation device 2 can present imitational granularity or smoothnessto the finger by making use of the above described electrostatic forceto cause the finger to feel the vibration.

Specifically, in the case where 5 to 200 V is applied to the positiveelectrostatic interaction electrode 111 and 0 V is applied to thenegative electrostatic interaction electrode 112 with the frequencies of20 to 500 Hz, a granular feel can be presented. The higher the voltageis, the stronger the granularity is, and the lower the voltage is, theless strong the granularity is. In the case where the applied voltage is0 to 5 V, no granularity is presented but such a tactile sense asglass-like smoothness can be presented. With low frequencies, a feel ofcoarse surface can be presented, and with high frequencies, a feel offine surface is presented. As described above, with the voltages from 0to 200 V and the frequencies from 0 to 500 Hz, the tactile sensepresentation device 2 can express tactile senses from glass-likesmoothness to granularity.

1.3. Electric Current Tactile Sense Presenting Operation of the TactileSense Presentation Device

FIG. 3(1) is a diagram illustrating an example of the tactile sensepresentation device 2 illustrated in FIG. 1(1) causing the secondelectrodes 102 to function as the electric current tactile sensepresenting electrodes. In the tactile sense presentation device 2illustrated in FIG. 3(1), a part of the second electrodes 102 are usedas positive electric current interaction electrodes 115 whereas a partof the rest of the second electrodes 102 are used as negative electriccurrent interaction electrodes 116. A prescribed electric current issupplied to the positive electric current interaction electrodes 115.

FIG. 3(3) is a local sectional view illustrating a state of the secondelectrodes 102 of the tactile sense presentation device 2 illustrated inFIG. 3(1) having a finger placed on the top. As illustrated in FIG.3(3), an electric conductor 114 such as a human finger is placed tocover the top of the positive electric current interaction electrode 115and the negative electric current interaction electrode 116. A currentsource 117 is configured between the positive electric currentinteraction electrode 115 and the negative electric current interactionelectrode 116.

FIG. 3(2) is a diagram illustrating a drive waveform of an electriccurrent generated by the current source 117. The current source 117causes an electric current to flow from the positive electric currentinteraction electrode 115 to the negative electric current interactionelectrode 116. That is, the electric current flows through the electricconductor, i.e., the finger 114. As a result, sensory nerves in the skinare directly stimulated. As the electric current of the current source117 temporally changes, the stimulus experienced by the dielectric(finger) 114 changes, and therefore, the dielectric (finger) 114 feels avibration.

Usually, while a finger is being moved along a stepped surface, thefinger catches a vibration from the stepped part and feels a tactilesense of the sizes and the intervals of the steps according to thestrength and the frequency of the vibration. The tactile sensepresentation device 2 can present an imitational feel of roughness ofsteps by making use of the above described electric current stimulationto cause the finger to feel the vibration.

Specifically, in the case where an electric current 0 to 10 mA isapplied between the positive electric current interaction electrode 115and the negative electric current interaction electrode 116 with thefrequency of 1 to 1200 Hz, a feel of roughness of steps can bepresented. The larger the electric current is, the larger the felt stepis, and the smaller the electric current is, the smaller the felt stepis. In the case where the electric current is less than 0.5 mA, no stepis felt and such a tactile sense as glass-like flatness can bepresented. Therefore, with the electric currents from 0 to 10 mA and thefrequencies from 1 to 1200 Hz, the tactile sense presentation device 2can express tactile senses from a glass-like flatness feel to a feel ofa stepped surface.

As described above, the electrostatic tactile sense presentingelectrodes are capable of presenting feels of granularity andsmoothness. On the other hand, the electric current tactile sensepresenting electrodes are capable of presenting a feel of roughness ofsteps. The tactile sense presentation device according to the embodimentprovided with a combination of a great number of these electrodes whichare fine electrodes is capable of presenting elaborate tactile senseswith mixed feels of granularity and roughness.

1.4. Touch Panel Operation of the Tactile Sense Presentation Device

FIG. 4 is a diagram illustrating an example of the tactile sensepresentation device 2 illustrated in FIG. 1(1) causing the firstelectrodes 101 to function as touch sensor electrodes.

In the example illustrated in FIG. 4, the tactile sense presentationdevice 2 applies a drive voltage (touch drive) to a second extractionelectrode 104B of the plurality of second extraction electrodes 104 todetect electric potentials of the respective first extraction electrodes103 in order (touch sense). As a result, the first electrodes 101 whichare electrically connected with the second extraction electrodes 104Bamong the plurality of first electrodes 101 operate as drive electrodes101B, whereas the first electrodes 101 which are electrically connectedwith the first extraction electrodes 103 operate as sense electrodes101A.

In the case where an alternating current signal, for example, is appliedto the drive electrode 101B, alternating current signals according tothe capacities between the drive electrode 101B and the sense electrodes101A are derived from the first extraction electrodes 103. Theelectrostatic capacities between the drive electrode 101B and the senseelectrodes 101A differ depending on whether or not the dielectric suchas a human finger is at the places of the drive electrode 101B and thesense electrodes 101A. Therefore, the tactile sense presentation device2 is capable of detecting the capacities between the drive electrode101B and the sense electrodes 101A by applying the alternating voltageto the drive electrode 101B and measuring the waveforms of the senseelectrodes 101A. Then, the tactile sense presentation device 2 iscapable of detecting the presence or absence of the dielectric such as ahuman finger based on the capacities. Further, based on the positions ofthe driven second extraction electrode 104 and the first extractionelectrodes 103 from which the signals are detected, the dielectric suchas a human finger can be located. Further, the tactile sensepresentation device 2 can sequentially change the first electrode 101which is to be caused to function as the drive electrode 101B bysequentially changing the second extraction electrode 104 to which analternating voltage is to be applied to, for example, the adjacentsecond extraction electrode 104. As a result, the tactile sensepresentation device 2 which has the plurality of first electrodes 101arranged on it can operate as a touch panel and detect the position ofthe dielectric such as a human finger in a touch surface of the touchpanel.

1.5. Modifications of the Embodiment

In the present embodiment, the first electrodes 101 are configured tooperate as the drive electrodes of a touch sensor, the sense electrodesof a touch sensor, the positive electrostatic interaction electrodes fortactile sense presentation, and the negative electrostatic interactionelectrodes for tactile sense presentation. It is needless to say thatthe third extraction electrodes 105 and the fourth extraction electrodes106 can be configured to cause the second electrodes 102 to operate asthe drive electrodes of a touch sensor, the sense electrodes of a touchsensor, the positive electric current interaction electrodes for tactilesense presentation, and the negative electric current interactionelectrodes for tactile sense presentation.

Although the first electrode 101 is assumed to be a pentagon in theembodiment, the shape of the first electrode 101 is not particularlylimited and the first electrode 101 may be in any shape which forms anelectrostatic capacity with a human finger or the like to make the firstelectrode 101 available for the electrostatic tactile sense presentingfunction or the touch panel function. For example, the first electrode101 may be a square, a rectangle, a hexagon, or a round.

Although the second electrode 102 is assumed to be a square, the shapeof the second electrode 102 is not particularly limited and the secondelectrode 102 may be in any shape which enables an electric current toflow through a human finger or the like to make the second electrode 102available for the electric current tactile sense presenting function.For example, the second electrode 102 may be a rectangle, a hexagon, ora round.

Although the first electrodes 101, the second electrodes 102, the firstextraction electrodes 103, the second extraction electrodes 104, thethird extraction electrodes 105, and the fourth extraction electrodes106 are assumed to be made of ITO of 100 μm in thickness, it is apparentthat the electrodes may be made of any material which has an electricalconductance. For example, a metal oxide such as ZnO (zinc oxide), ametal such as Al, Cu, Ag, or Au, or a conductive organic material may beused other than ITO.

Although glass is used for the insulating film 107 and the substrate108, the material is not particularly limited and any material may beused so far as it is an insulating material. For example, an organicinsulator such as PET or polyimide may be used. Even in the case wherethe tactile sense presentation device with a touch panel function isarranged on the front side of an image display device such as a liquidcrystal display, an organic electroluminescent display, or a plasmadisplay, the tactile sense presentation device does not disturb thedisplay function of the image display device, so far as the firstelectrodes 101, the second electrodes 102, the first extractionelectrodes 103, the second extraction electrodes 104, the thirdextraction electrodes 105, the fourth extraction electrodes 106, and theinsulating film 107 are made of a material “transparent” to visiblelight such as ITO, ZnO, or glass.

The term “transparent” here means a feature of allowing an image to bevisible to the human eyes. Therefore, the material only needs to allowan image on the display to be visible to the human eyes even with lowtransmittance of light of wavelength within a visual light range.

Alternatively, a metal such as Ag or carbon fiber which are as fine asinvisible to the human eyes, even if not transparent in a wavelengthrange of visible light, may be used for the first electrodes 101, thesecond electrodes 102, the first extraction electrodes 103, the secondextraction electrodes 104, the third extraction electrodes 105, and thefourth extraction electrodes 106.

Although the insulating film 107 covering the first electrodes 101 is 1μm thick in the embodiment, the thickness is not limited to that.

In the case where a temporally changing voltage is applied between thepositive electrostatic interaction electrodes 111 and the negativeelectrostatic interaction electrodes 112 and the dielectric (finger) 110is in the vicinity of the surface of the insulating film 107, the amountof change Δf/S of the electrostatic force per unit area that is appliedby the first electrodes 101 to the dielectric (finger) 110 isrepresented by the expression 1 below.

$\begin{matrix}{\frac{\Delta \; f}{S} \propto \frac{ɛ_{r}ɛ_{0}\Delta \; V^{2}}{h^{2}}} & \left\lbrack {{Expression}\mspace{14mu} 1} \right\rbrack\end{matrix}$

In the expression 1, Δf is the amount of change of the force experiencedby the dielectric (finger) 101, S is a projected area of the dielectric(finger) 110 on a plane formed by the first electrodes 101, i.e., anarea of capacity made by the dielectric (finger) 101 and the firstelectrodes 101, ∈r is a relative permittivity of the insulating film107, ∈0 is a permittivity in vacuum, ΔV is the maximum value of apotential difference between the first electrodes 101 and the dielectric(finger) 110 (which is a potential difference between the positiveelectrostatic interaction electrode 111 and the negative electrostaticinteraction electrode 112, and also a temporal amount of change of thepotential of the positive electrostatic interaction electrode 111 (thenegative electrostatic interaction electrode 112), and h is a distancebetween the first electrodes 101 and the dielectric (finger) 110. Sincethe dielectric (finger) 110 is in contact with the surface of theinsulating film 107 when the operator is using the tactile sensepresentation device 2, h is the thickness of the insulating film 107 inthe surface side of the first electrodes 101. It is understood from theexpression 1 that the amount of force change per unit area Δf/S is inproportion to the square of the voltage difference ΔV and in inverseproportion to the square of the thickness h of the insulating film 107.In the embodiment, the tactile sense presenting function is realizedwith the insulating film 107 of 1 μm in thickness and the voltage ΔV of0 to 200 V. As far as ΔV/h>5[V/μm] is satisfied, an enough amount offorce change per unit area Δf/S is achieved. For example, in the casewhere the insulating film 107 is 10 μm in thickness, the tactile sensepresenting function is realized with the voltage ΔV in the range of 50 Vor more.

1.6. Summarization

The tactile sense presentation device according to the embodiment hasthe electrostatic tactile sense presenting electrodes and the electriccurrent tactile sense presenting electrodes arranged on the same plane.As a result, the tactile sense presentation device according to theembodiment is capable of presenting elaborate tactile senses as a resultof realizing both of tactile sense presentation based on electriccurrent stimulation and tactile sense presentation based on anelectrostatic force without decreasing the effect of the electrostatictactile sense presentation.

Second Embodiment 2.1. Configuration and Operation in an Active MatrixSystem

The tactile sense presentation device 2 with a touch panel functionaccording to the first embodiment of the present invention adopts apassive matrix system. As a result, the tactile sense presentationdevice 2 selects the first electrodes 101 to be caused to function asthe electrostatic tactile sense presenting electrodes from among theplurality of first electrodes 101 by the unit of the first extractionelectrode 103 or by the unit of the second extraction electrode 104.Further, the tactile sense presentation device 2 with a touch panelfunction according to the first embodiment selects the first electrodes101 to be caused to function as the touch sensor electrodes from amongthe plurality of first electrodes 101 by the unit of the firstextraction electrode 103 or by the unit of the second extractionelectrode 104. Still further, the control unit of the tactile sensepresentation device 2 according to the first embodiment causes the firstelectrodes 101 to function as the electrostatic tactile sense presentingelectrodes and the touch sensor electrodes in a time sharing manner.

In contrast, a tactile sense presentation device 2 with a touch panelfunction according to a second embodiment of the present inventionadopts an active matrix system. That is, a control unit of the tactilesense presentation device 2 according to the second embodiment causesthe first electrodes 101 to function as the electrostatic tactile sensepresenting electrodes and the touch sensor electrodes in a time sharingmanner in the active matrix system. The tactile sense presentationdevice 2 with a touch panel function according to the second embodimentwill be described below by focusing on points different from the tactilesense presentation device 2 with a touch panel function according to thefirst embodiment.

FIG. 5 is a diagram illustrating a configuration of a first electrode101 of the tactile sense presentation device 2 with a touch panelfunction according to the second embodiment. First extraction electrodes103 and second extraction electrodes 104 are connected with the firstelectrode 101 of the tactile sense presentation device 2 according tothe second embodiment illustrated in FIG. 5. Further, as illustrated inFIG. 5, both of the first extraction electrodes 103 and the secondextraction electrodes 104 contain a plurality of signal lines. Theplurality of signal lines are connected with semiconductor circuits 71to 74.

The control unit of the tactile sense presentation device 2 according tothe second embodiment causes the first electrodes 101 to function as theelectrostatic tactile sense presenting electrodes and the touch sensorelectrodes in a time sharing manner by using the above described firstextraction electrodes 103, second extraction electrodes 104, andsemiconductor circuits 71 to 74.

Configurations of the first extraction electrode 103, the secondextraction electrode 104, and the semiconductor circuits 71 to 74according to the second embodiment will be described.

In the embodiment, the first extraction electrode 103 includes fourselect lines of a Y-direction select line (touch drive) 21, aY-direction select line (tactile sense-positive) 22, a Y-directionselect line (touch sense) 23, and a Y-direction select line (tactilesense-negative) 24.

The second extraction electrode 104 includes eight conductor lines of adrive line (touch drive) 31, an X-direction select line (touch drive)32, a drive line (tactile sense-positive) 33, an X-direction select line(tactile sense-positive) 34, a drive line (touch sense) 35, anX-direction select line (touch sense) 36, a drive line (tactilesense-negative) 37, and an X-direction select line (tactilesense-negative) 38. Semiconductor circuits 7 include the four samesemiconductor circuits 71 to 74.

The semiconductor circuit 71 is arranged at the intersection point ofthe X-direction select line (touch drive) 32, the drive line (touchdrive) 31, and the Y-direction select line (touch drive) 21. Thesemiconductor circuit 72 is arranged at the intersection point of theX-direction select line (tactile sense-positive) 34, the drive line(tactile sense-positive) 33, and the Y-direction select line (tactilesense-positive) 22. The semiconductor circuit 73 is arranged at theintersection point of the X-direction select line (touch sense) 36, thedrive line (touch sense) 35, and the Y-direction select line (touchsense) 23. The semiconductor circuit 74 is arranged at the intersectionpoint of the X-direction select line (tactile sense-negative) 38, thedrive line (tactile sense-negative) 37, and the Y-direction select line(tactile sense-negative) 24. The respective semiconductor circuits 71 to74 are connected with the first electrode 101.

As a result of turning ON one of the semiconductor circuits 71 to 74illustrated in FIG. 5 associated with a predetermined function, thefirst electrode 101 can be caused to function as any of a driveelectrode 101B of a touch sensor, a sense electrode 101A of a touchsensor, a positive electrostatic interaction electrode 111 for tactilesense presentation, and a negative electrostatic interaction electrode112 for tactile sense presentation.

Specifically, a case where the first electrode 101 is caused to functionas the drive electrode 101B of a touch sensor will be described. First,the X-direction select line (touch drive) 32 and the Y-direction selectline (touch drive) 21 corresponding to the first electrode 101 which isto be caused to function as the drive electrode 101B of a touch sensorare set to ON voltages, so that the semiconductor circuit 71 at theintersection point of the select lines 21 and 32 is charged. Next, theX-direction select line (tactile sense-positive) 34, the X-directionselect line (touch sense) 36, the X-direction select line (tactilesense-negative) 38 are set to ON voltages, then the Y-direction selectline (tactile sense-positive) 22, the Y-direction select line (touchsense) 23, and the Y-direction select line (tactile sense-negative) 24are set to OFF voltages, so that the semiconductor circuits 72, 73, and74 are discharged. As a result, the voltage of the drive line (touchdrive) 31 appears at the first electrode 101, and the voltage of thefirst electrode 101 becomes independent of the voltages of the driveline (tactile sense-positive) 33, the drive line (touch sense) 35, andthe drive line (tactile sense-negative) 37.

Further, by recharging or discharging the semiconductor circuits 71 to74 by using the corresponding first extraction electrodes 103 and secondextraction electrodes 104 after a certain time period, the tactile sensepresentation device 2 can cause the respective first electrodes 101 tohave different functions.

In the above example, the semiconductor circuit 71 among thesemiconductor circuits 71 to 74 has been described. As for thesemiconductor circuit 73, the tactile sense presentation device 2 canlead the charge and the potential appearing at the first electrode 101to the control unit via the drive line 35 by causing the semiconductorcircuit 73 to operate in the same manner as the semiconductor circuit71. Further, as for the semiconductor circuit 72, the tactile sensepresentation device 2 can apply the drive voltage for tactile sensepresentation (tactile sense-positive) from the control unit to the firstelectrode 101 via the drive line 33 by causing the semiconductor circuit72 to operate in the same manner as the semiconductor circuit 71. Stillfurther, as for the semiconductor circuit 74, the tactile sensepresentation device 2 can apply the drive voltage for tactile sensepresentation (tactile sense-negative) from the control unit to the firstelectrode 101 via the drive line 37 by causing the semiconductor circuit74 to operate in the same manner as the semiconductor circuit 71.

In the configuration illustrated in FIG. 5, the four semiconductorcircuits 71 to 74 are connected with the single first electrode 101. Thetactile sense presentation device 2 is configured to cause each one ofthe first electrodes 101 to operate as any of the drive electrode of atouch sensor, the sense electrode of a touch sensor, the positiveelectrostatic interaction electrode for tactile sense presentation, andthe negative electrostatic interaction electrode for tactile sensepresentation in a time sharing manner. However, each of the firstelectrodes 101 is not necessarily required to function as all of thefour kinds of electrodes. For example, the tactile sense presentationdevice 2 may cause half of the plurality of first electrodes 101 tofunction as the drive electrodes of a touch sensor and the positiveelectrostatic interaction electrodes for tactile sense presentation, andcause the other half to function as the sense electrodes of a touchsensor and the negative electrostatic interaction electrodes for tactilesense presentation. In that case, the plurality of first electrodes 101,as a whole, are caused to function as the touch sensor and the tactilesense presentation device. Therefore, since only two of thesemiconductor circuits 71 are required for the single first electrode101, reduction in the area and the cost of the semiconductor circuits 71can be achieved.

The tactile sense presentation device 2 determines whether the firstelectrode 101 is to be function as the touch sensor or as the tactilesense presentation device based on the signal given to the firstelectrode 101. In the embodiment, the signal given to the firstelectrode 101 is switched by the four semiconductor circuits 71 to 74provided below the first electrode 101. However, the present embodimentis not limited to that. For example, the signal given to the firstelectrode 101 may be switched in the control unit. In that case, it isno longer required to provide the four semiconductor circuits 71 to 74for the single first electrode 101. That is, it is required to provideonly one semiconductor circuit to control whether a drive voltage or thelike supplied from the control unit is given to the first electrode 101.As a result, reduction in the area and the cost of the semiconductorcircuits 7 can be achieved.

2.1. Modifications of the Embodiment

In the present embodiment, the first electrodes 101 are configured tooperate as the drive electrodes of a touch sensor, the sense electrodesof a touch sensor, the positive electrostatic interaction electrodes fortactile sense presentation, and the negative electrostatic interactionelectrodes for tactile sense presentation. It is needless to say thatthe third extraction electrodes 105 and the fourth extraction electrodes106 can be configured to cause the second electrodes 102 to operate asthe drive electrodes of a touch sensor, the sense electrodes of a touchsensor, the positive electric current interaction electrodes for tactilesense presentation, and the negative electric current interactionelectrodes for tactile sense presentation.

Third Embodiment

FIG. 6(1) is a plan view of a part of a tactile sense presentationdevice 2 with a touch panel function according to a third embodiment ofthe present invention, and FIG. 6(2) is a longitudinal sectional view ofthe tactile sense presentation device 2 illustrated in FIG. 6(1) takenalong a line

As illustrated in FIGS. 1 and 6, the tactile sense presentation devicewith a touch panel function according to the third embodiment has almostthe same configuration as that of the tactile sense presentation devicewith a touch panel function according to the first embodiment. Incontrast to the tactile sense presentation device with a touch panelfunction according to the first embodiment which has the firstelectrodes 101 and the second electrodes 102 arranged on the same plane,the tactile sense presentation device with a touch panel functionaccording to the third embodiment has first electrodes 101 and secondelectrodes 102 arranged on different planes.

Specifically, in the tactile sense presentation device 2 according tothe third embodiment illustrated in FIG. 6(2), firstly, a plurality offirst electrodes (electrostatic tactile sense presenting electrodes) 101are arranged on the top of a substrate 108. An insulating film 107 isarranged to cover the plurality of first electrodes (electrostatictactile sense presenting electrodes) 101 and the substrate 108. Further,the second electrodes (electric current tactile sense presentingelectrodes) 102 are arranged on the top of the insulating film 107.

The tactile sense presentation device 2 according to the thirdembodiment is the same as the tactile sense presentation deviceaccording to the first embodiment in that first extraction electrodes103, which are arranged below the first electrodes 101, are a pluralityof electrodes extracted in one direction of the plane and secondextraction electrodes 104, which are arranged below the first electrodes101, are a plurality of electrodes extracted in a direction differentfrom that of the first extraction electrodes 103.

Also, the tactile sense presentation device 2 according to the thirdembodiment is the same as the tactile sense presentation deviceaccording to the first embodiment in that third extraction electrodes105, which are arranged below the second electrodes 102, are a pluralityof electrodes extracted in one direction of the plane and fourthextraction electrodes 106, which are arranged below the secondelectrodes 102, are a plurality of electrodes extracted in a directiondifferent from that of the third extraction electrodes 105.

Further, the tactile sense presentation device 2 according to the thirdembodiment is the same as the tactile sense presentation deviceaccording to the first embodiment also in that the plurality of firstelectrodes 101 have their bottoms electrically connected with the firstextraction electrodes 103 or the second extraction electrodes 104 andthe plurality of second electrodes 102 have their bottoms electricallyconnected with the third extraction electrodes 105 or the fourthextraction electrodes 106.

A manufacturing method of the tactile sense presentation device 2 with atouch panel function according to the third embodiment will be describedlater.

The tactile sense presentation device 2 with a touch panel functionaccording to the third embodiment has almost the same configuration asthat of the tactile sense presentation device with a touch panelfunction according to the first embodiment and operates as a passivematrix tactile sense presentation device with a touch panel function.

Further, with an appropriate configuration of the first extractionelectrodes 103, the second extraction electrodes 104, the thirdextraction electrodes 105, the fourth extraction electrodes 106, andsemiconductor circuits 71 to 74 (not shown), the tactile sensepresentation device 2 with a touch panel function according to the thirdembodiment illustrated in FIG. 6 can be made to operate as an activematrix tactile sense presentation device with a touch panel function.

Fourth Embodiment

As described in the first to third embodiments, the electrostatictactile sense presenting electrodes and the electric current tactilesense presenting electrodes in the tactile sense presentation device canbe adapted to a passive matrix system and also can be adapted to anactive matrix system. Further, as shown in FIG. 10, the electrostatictactile sense presenting electrodes and the electric current tactilesense presenting electrodes also can be adapted to a dimensionlessmatrix system. Here, the dimensionless matrix system refers to a systemfor causing the same voltage or the same electric current to be appliedto all of the electrodes to make each of the electrodes present the sametactile sense.

As described in the first to third embodiments, also the touch sensorelectrodes in the tactile sense presentation device with a touch panelfunction can be adapted to a passive matrix system and also can beadapted to an active matrix system.

Further, the electrodes (the first electrodes 101 and the secondelectrodes 102) according to the first to third embodiments have both ofthe functions of the tactile sense presenting electrodes and the touchsensor electrodes. Although it has been described that the tactile sensepresenting electrode function and the touch sensor electrode functionare switched in a time sharing manner in the first to third embodiments,the tactile sense presenting electrodes and the touch sensor electrodesmay be arranged in a space sharing manner. FIG. 7(1) is a table showingcombination patterns of electrodes which carry out both of an electriccurrent tactile sense presenting function and a touch sensor function,and FIG. 7(2) is a table showing combination patterns of electrodeswhich carry out both of an electrostatic tactile sense presentingfunction and a touch sensor function. As illustrated in FIGS. 7(1),7(2), and 10, the tactile sense presenting electrodes can be adapted toa dimensionless matrix system, a passive matrix system, and an activematrix system. The touch sensor electrodes can be adapted to a passivematrix system and an active matrix system.

As illustrated in FIGS. 7(1) and 7(2), among the electrodes which carryout both of the tactile sense presenting electrode function and thetouch sensor electrode function, the tactile sense presenting electrodesand the touch sensor electrodes can be arranged in a space sharingmanner. In the case where either of the tactile sense presentingelectrodes and the touch sensor electrodes are adapted to the activematrix system, each of the electrodes needs to have a semiconductorcircuit (TPI) 7. In the case where the electrodes are adapted to theactive matrix system as described above, the tactile sense presentingelectrode function and the touch sensor electrode function may beprovided for each of the electrodes in a time sharing manner.

4.1. Combinations of the Electrostatic Tactile Sense PresentingElectrodes and the Electric Current Tactile Sense Presenting ElectrodesArranged on the Same Plane of the Tactile Sense Presentation Device

FIG. 8 is a table showing sharing combinations of a set of the electriccurrent tactile sense presenting electrodes and the touch sensorelectrodes and a set of the electrostatic tactile sense presentingelectrodes and the touch sensor electrodes, the functions of whichcoexist in a space sharing manner or in a time sharing manner in thetactile sense presentation device as illustrated in FIG. 1 which has theelectrostatic tactile sense presenting electrodes and the electriccurrent tactile sense presenting electrodes arranged on the same plane.

For example, the number (1) in FIG. 8 indicates a combination of theelectric current tactile sense presenting electrodes which function asdedicated electrodes and a set of the electrostatic tactile sensepresenting electrodes and the touch sensor electrodes the functions ofwhich coexist with each other in a space sharing manner. The entry for“exposed electrode” indicates that the electric current tactile sensepresenting electrodes are exposed, and the entry for “unexposedelectrode” indicates that the voltage (electrostatic) tactile sensepresenting electrodes which also serve as the touch sensor electrodesare unexposed (i.e., covered with an insulating film).

For example, the number (3) in FIG. 8 indicates a combination of theelectric current tactile sense presenting electrodes which function asdedicated electrodes and a set of the electrostatic tactile sensepresenting electrodes and the touch sensor electrodes the functions ofwhich coexist with each other in a space sharing manner or in a timesharing manner in the tactile sense presentation device.

For example, the number (6) in FIG. 8 indicates a combination of theelectrostatic tactile sense presenting electrodes which function asdedicated electrodes and a set of the electric current tactile sensepresenting electrodes and the touch sensor electrodes the functions ofwhich coexist with each other in a space sharing manner or in a timesharing manner in the tactile sense presentation device.

For example, the number (9) in FIG. 8 indicates a combination of a setof the electric current tactile sense presenting electrodes and thetouch sensor electrodes the functions of which coexist with each otherin a space sharing manner and a set of the electrostatic tactile sensepresenting electrodes and the touch sensor electrodes the functions ofwhich coexist with each other in a space sharing manner or in a timesharing manner in the tactile sense presentation device.

For example, the number (12) in FIG. 8 indicates a combination of a setof the electric current tactile sense presenting electrodes and thetouch sensor electrodes the functions of which coexist with each otherin a time sharing manner and a set of the electrostatic tactile sensepresenting electrodes and the touch sensor electrodes the functions ofwhich coexist with each other in a space sharing manner or in a timesharing manner in the tactile sense presentation device.

For example, the number (15) in FIG. 8 indicates a combination of a setof the electric current tactile sense presenting electrodes and thetouch sensor electrodes the functions of which coexist with each otherin a space sharing manner or in a time sharing manner and a set of theelectrostatic tactile sense presenting electrodes and the touch sensorelectrodes the functions of which coexist with each other in a spacesharing manner or in a time sharing manner in the tactile sensepresentation device.

For example, the number (16) in FIG. 8 indicates a combination of theelectric current tactile sense presenting electrodes which function asdedicated electrodes and the electrostatic tactile sense presentingelectrodes which function as dedicated electrodes in the tactile sensepresentation device. In the last combination, the tactile sensepresentation device does not have a touch panel function.

4.2. Combinations of the Electrostatic Tactile Sense PresentingElectrodes and the Electric Current Tactile Sense Presenting ElectrodesArranged on Different Planes of the Tactile Sense Presentation Device

FIG. 9 is a table showing sharing combinations of a set of the electriccurrent tactile sense presenting electrodes and the touch sensorelectrodes and a set of the electrostatic tactile sense presentingelectrodes and the touch sensor electrodes, the functions of whichcoexist in a space sharing manner or in a time sharing manner in thetactile sense presentation device as illustrated in FIG. 6 which has theelectrostatic tactile sense presenting electrodes and the electriccurrent tactile sense presenting electrodes arranged on differentplanes.

The table shown in FIG. 9 is almost the same as the table shown in FIG.8 except that the table shown in FIG. 9 does not contain a combinationof the electric current tactile sense presenting electrodes whichfunction as dedicated electrodes and the electrostatic tactile sensepresenting electrodes which function as dedicated electrodes in thetactile sense presentation device.

4.3.1. Combination Example (1) of the Tactile Sense PresentingElectrodes in the Tactile Sense Presentation Device

FIG. 11 is a diagram illustrating a configuration of the tactile sensepresentation device which realizes a combination example of the tactilesense presenting electrodes. The tactile sense presentation deviceillustrated in FIG. 11 realizes the combination of the number (16) shownin FIG. 8 and adopts the active matrix system shown in FIG. 10. That is,the first electrodes 101 are only used as the electrostatic tactilesense presenting electrodes whereas the second electrodes 102 are onlyused as the electric current tactile sense presenting electrodes. FIG.11(1) is a plane view illustrating a configuration of first electrodes101, second electrodes 102, first extraction electrodes 103, secondextraction electrodes 104, third extraction electrodes 105, and fourthextraction electrodes 106 of the tactile sense presentation device. FIG.11(2) is longitudinal sectional views of the tactile sense presentationdevice illustrated in FIG. 11(1) taken along lines (a) and (b). FIG.11(3) is a block diagram of the tactile sense presentation deviceincluding a data processing unit 50, an electrostatic tactile sensedriver unit 52, and an electric current tactile sense driver unit 54.

As illustrated in FIGS. 11(1) and 11(2), semiconductor circuits (TFT) 7are provided below the first electrodes 101 and the second electrodes102. As also illustrated in FIG. 5, the first extraction electrodes 103,the second extraction electrodes 104, the third extraction electrodes105, and the fourth extraction electrodes 106 contain a plurality ofsignal lines (see arrows from a). Further, as illustrated in FIG. 11(3),the first extraction electrodes 103 and the second extraction electrodes104 are connected with the electrostatic tactile sense driver unit 52,and the third extraction electrodes 105 and the fourth extractionelectrodes 106 are connected with the electric current tactile sensedriver unit 54. Therefore, the data processing unit 50 controls signalsto be given to the first electrodes 101 through the first extractionelectrodes 103 and the second extraction electrodes 104 by theelectrostatic tactile sense driver unit 52. The data processing unit 50also controls signals to be given to the second electrodes 102 throughthe third extraction electrodes 105 and the fourth extraction electrodes106 by the electric current tactile sense driver unit 54.

The data processing unit 50 is a control unit for controlling respectivecomponents which configure the tactile sense presentation device andexternal devices by processing the input signals and data and outputtingrespective control signals and control data. The data processing unit 50realizes the respective functions by executing on a processor programsfor realizing the functions according to the embodiment. The dataprocessing unit 50 may be implemented by a hard-wired device capable ofproviding functions according to the embodiment.

Meanwhile, as illustrated in FIG. 11(3), the data processing unit 50also processes data related with an external image display unit 56.Therefore, the tactile sense presentation device illustrated in FIG. 11can be used in combination with the external image display unit 56.

Further, as illustrated in FIG. 11(3), the data processing unit 50 alsoprocesses data related with an external contact sensing unit 58. Theexternal contact sensing unit 58 is an external touch sensor devicewhich has a contact position detection unit for detecting a position ofan approaching part of the body of the operator on the tactile sensepresentation device. With that function, the tactile sense presentationdevice is capable of outputting an electric signal only to electrodescorresponding to the part of the body in contact with the tactile sensepresentation device. The aspect can reduce the power consumption withoutreducing the amount of information presented by the tactile sense.

The contact position detection unit in the external contact sensing unit58 may be implemented by a scanning mechanism which scans the tactilesense presentation device in a plane direction to detect the contactposition. The scanning mechanism may include an XY laser scanner whichdetects a contact position based on a change in a laser beam. Further,the contact position detection unit in the external contact sensing unit58 may be implemented by a detection mechanism which detects a contactposition based on a change in a physical property of a section forpresenting the tactile sense or may include a pressure sensor whichdetects a contact position based on a change in pressure on the sectionfor presenting the tactile sense.

FIG. 12(1) is a diagram illustrating the first electrodes 101 of thetactile sense presentation device illustrated in FIG. 11 operating asthe electrostatic tactile sense presenting electrodes. FIG. 12(2) is adiagram illustrating the second electrodes 102 of the tactile sensepresentation device illustrated in FIG. 11 operating as the electriccurrent tactile sense presenting electrodes.

In the tactile sense presentation device illustrated in FIG. 12(1), aperiodic voltage is applied between the hatched first electrodes 101 andthe first electrodes 101 filled with dots. Therefore, on the conditionthat a dielectric (finger) is placed between these electrodes 101, atactile sense of granularity can be given to the dielectric (finger).

In the tactile sense presentation device illustrated in FIG. 12(2), aperiodic electric current is supplied between the second electrodes 102which are filled with fine dots and the second electrodes 102 which arefilled with coarse dots. Therefore, on the condition that an electricconductor (finger) is placed between these electrodes 102, a tactilesense of roughness can be given to the electric conductor (finger).

4.3.2. Combination Example (2) of the Tactile Sense PresentingElectrodes in the Tactile Sense Presentation Device

FIG. 13 is a diagram illustrating a configuration of the tactile sensepresentation device which realizes a combination example of the tactilesense presenting electrodes. The tactile sense presentation deviceillustrated in FIG. 13 realizes the combination of the number (3) shownin FIG. 8 and adopts the active matrix system shown in FIG. 10. That is,the first electrodes 101 are used as the electrostatic tactile sensepresenting electrodes or the touch sensor electrodes in a space sharingmanner or in a time sharing manner whereas the second electrodes 102 areonly used as the electric current tactile sense presenting electrodes.FIG. 13(1) is a plane view illustrating a configuration of the firstelectrodes 101, the second electrodes 102, the first extractionelectrodes 103, the second extraction electrodes 104, the thirdextraction electrodes 105, and the fourth extraction electrodes 106 ofthe tactile sense presentation device. FIG. 13(2) is longitudinalsectional views of the tactile sense presentation device illustrated inFIG. 13(1) taken along lines (a) and (b). FIG. 13(3) is a block diagramof the tactile sense presentation device including the data processingunit 50, the electrostatic tactile sense driver unit 52, the electriccurrent tactile sense driver unit 54, and an electrostatic contactsensing unit 60.

As illustrated in FIGS. 13(1) and 13(2), the semiconductor circuits(TFT) 7 are provided below the first electrodes 101 and the secondelectrodes 102. As also illustrated in FIG. 5, the first extractionelectrodes 103, the second extraction electrodes 104, the thirdextraction electrodes 105, and the fourth extraction electrodes 106connected with the semiconductor circuits (TFT) 7 contain a plurality ofsignal lines (see arrows from α). On the other hand, each of the firstextraction electrodes 103 and the second extraction electrodes 104 whichare not connected with the semiconductor circuits (TFT) 7 is made of asingle signal line (see arrows from β). Further, as illustrated in FIG.13(3), the first extraction electrodes 103 and the second extractionelectrodes 104 are connected with the electrostatic tactile sense driverunit 52 and the electrostatic contact sensing unit 60, and the thirdextraction electrodes 105 and the fourth extraction electrodes 106 areconnected with the electric current tactile sense driver unit 54.Therefore, the data processing unit 50 controls signals to be given tothe first electrodes 101 through the first extraction electrodes 103 andthe second extraction electrodes 104 by the electrostatic tactile sensedriver unit 52 and the electrostatic contact sensing unit 60. The dataprocessing unit 50 also controls signals to be given to the secondelectrodes 102 through the third extraction electrodes 105 and thefourth extraction electrodes 106 by the electric current tactile sensedriver unit 54.

As illustrated in FIG. 13(3), the data processing unit 50 also processesdata related with an external image display unit 56. Therefore, thetactile sense presentation device illustrated in FIG. 13 can be usedtogether with the external image display unit 56.

FIG. 14(1) is a diagram illustrating the first electrodes of the tactilesense presentation device illustrated in FIG. 13 operating as the touchsensor electrodes or the electrostatic tactile sense presentingelectrodes. FIG. 14(2) is a diagram illustrating the second electrodes102 of the tactile sense presentation device illustrated in FIG. 13operating as the electric current tactile sense presenting electrodes.

In the tactile sense presentation device illustrated in FIG. 14(1), thecross-hatched first electrodes 101 operates as the touch sensorelectrodes in a space sharing manner with the other first electrodes101.

In the tactile sense presentation device illustrated in FIG. 14(1), aperiodic voltage is applied between the first electrodes 101 with leftdown hatching (located almost in the center) and the first electrodes101 with right down hatching. Therefore, on the condition that adielectric (finger) is placed between these electrodes 101, a tactilesense of granularity can be given to the dielectric (finger). Further,these hatched first electrodes 101 also operate as the touch sensorelectrodes in a time sharing manner.

In the tactile sense presentation device illustrated in FIG. 14(2), aperiodic electric current is supplied between the second electrodes 102which are filled with fine dots and the second electrodes 102 which arefilled with coarse dots. Therefore, on the condition that an electricconductor (finger) is placed between these electrodes 102, a tactilesense of roughness can be given to the electric conductor (finger).

Fifth Embodiment

A manufacturing method of the tactile sense presentation deviceaccording to the embodiments of the present invention will be described.

5.1. Manufacturing Method of the Tactile Sense Presentation DeviceHaving the Electrostatic Tactile Sense Presenting Electrodes and theElectric Current Tactile Sense Presenting Electrodes Arranged on theSame Plane

FIGS. 15A, 15B, 16A, and 16B illustrate an outline of manufacturingmethods of the tactile sense presentation device having theelectrostatic tactile sense presenting electrodes and the electriccurrent tactile sense presenting electrodes arranged on a same plane inwhich both of the electric current tactile sense presenting electrodesand the electrostatic tactile sense presenting electrodes function asdedicated electrodes (see the number (16) in the table shown in FIG. 8).FIGS. 15A and 16A illustrate longitudinal sectional views taken along aline crossing vias 202 which are connected with the first electrodes101, whereas FIGS. 15B and 16B illustrate longitudinal sectional viewstaken along a line crossing vias 202 which are connected with the secondelectrodes 102 (though, FIG. 15A(j′) illustrates a longitudinalsectional view taken along a line crossing the vias 202 which areconnected with the second electrodes 102, whereas FIG. 16A(g′)illustrates a longitudinal sectional view taken along a line crossingthe vias 202 which are connected with the first electrodes 101).

In the method illustrated in FIGS. 15A and 15B, first, a section of thesubstrate 108 a at the bottom is made ((a) to (d)), then, a section of aprotective substrate 108 b at the top is made ((e) to (i)), and finally,these substrates are bonded together ((j)). First, the second extractionelectrodes 104 and the fourth electrodes 106 are placed on the substrate108 a ((a), (b)), and the semiconductor circuits 7 are placed on a partof the second extraction electrodes 104 (c). Then, an interlayerdielectric 109 is provided to cover the substrate 108 a, the secondextraction electrodes 104, the fourth extraction electrodes 106, and thesemiconductor circuits 7. Further, the first extraction electrodes 103and the third extraction electrodes 105 are placed on the semiconductorcircuits 7 ((d)).

On the other hand, the vias 202 are formed in the protective substrate108 b ((e), (f)), and then, the first electrodes 101 and the secondelectrodes 102 to be connected with the vias 202 are placed at the topof the protective substrate 108 b and connection electrodes 204 to beconnected with the vias 202 are placed at the bottom of the protectivesubstrate 108 b, respectively ((g)). Then, the insulating film 107 isprovided to cover the first electrodes 101 placed at the top of theprotective substrate 108 b ((h)). Finally, an adhesive 206 is applied tothe bottom of the protective substrate 108 b ((i)), and the top of thesubstrate 108 a and the bottom of the protective substrate 108 b arealigned and bonded ((j)). FIG. 15A(j′) is a longitudinal sectional viewtaken along a line crossing the vias 202 which are connected with thesecond electrodes 102, illustrating that the vias 202 which areconnected with the second electrodes 102 are connected with theconnection electrodes 204, the third extraction electrodes 105, thesemiconductor circuits 7, and the fourth extraction electrodes 106.

In the method illustrated in FIGS. 16A and 16B, the tactile sensepresenting device is made upward serially from a section of thesubstrate 108 a at the bottom ((a) to (g)). First, the second extractionelectrodes 104 and the fourth electrodes 106 are placed on the substrate108 a ((a), (b)), and the semiconductor circuits 7 are placed on a partof the second extraction electrodes 104 (c). Then, the interlayerdielectric 109 is provided to cover the substrate 108 a, the secondextraction electrodes 104, the fourth extraction electrodes 106, and thesemiconductor circuits 7. Further, the first extraction electrodes 103and the third extraction electrodes 105 are placed on the semiconductorcircuits 7 ((d)).

Then, an insulating layer 108 c is provided to cover the firstextraction electrodes 103 and the third extraction electrodes 105 ((e)).At this time, holes for the vias 202 are properly made above the secondextraction electrodes 104, the semiconductor circuits 7, and the firstextraction electrodes 103. After the insulating layer 108 c is provided,the vias 202 to be connected with the semiconductor circuits 7 and thelike are placed and the first electrodes 101 and the second electrodes102 to be connected with the vias 202 are placed ((f)). Finally, theinsulating film 107 is provided to cover the first electrodes 101 ((g)).FIG. 16A(g′) is a longitudinal sectional view taken along a linecrossing the vias 202 which are connected with the second electrodes102, illustrating that the vias 202 which are connected with the secondelectrodes 102 are connected with the third extraction electrodes 105,the semiconductor circuits 7, and the fourth extraction electrodes 106.

5.2. Manufacturing Method of the Tactile Sense Presentation DeviceHaving the Electrostatic Tactile Sense Presenting Electrodes and theElectric Current Tactile Sense Presenting Electrodes Arranged onDifferent Planes

FIGS. 17A, 17B, 18A, and 18B illustrate an outline of a manufacturingmethod of the tactile sense presentation device having the electrostatictactile sense presenting electrodes and the electric current tactilesense presenting electrodes arranged on different planes in which bothof the electric current tactile sense presenting electrodes and theelectrostatic tactile sense presenting electrodes function as dedicatedelectrodes (see the number (16) in the table shown in FIG. 8). FIGS. 17Aand 18A illustrate longitudinal sectional views taken along a linecrossing vias 202 which are connected with the first electrodes 101,whereas FIGS. 17B and 18B illustrate longitudinal sectional views takenalong a line crossing vias 202 which are connected with the secondelectrodes 102 (though, FIG. 17A(j′) illustrates a longitudinalsectional view taken along a line crossing the vias 202 which areconnected with the second electrodes 102, whereas FIG. 18A(h′)illustrates a longitudinal sectional view taken along a line crossingthe vias 202 which are connected with the first electrodes 101).

In the method illustrated in FIGS. 17A and 17B, first, a section of thesubstrate 108 a at the bottom is made ((a) to (d)), then, a section of aprotective substrate 108 b at the top is made ((e) to (i)), and finally,these substrates are bonded together ((j)). First, the second extractionelectrodes 104 and the fourth extraction electrodes 106 are placed onthe substrate 108 a ((a), (b)), and the semiconductor circuits 7 areplaced on a part of the second extraction electrodes 104 (c). Then, theinterlayer dielectric 109 is provided to cover the substrate 108 a, thesecond extraction electrodes 104, the fourth extraction electrodes 106,and the semiconductor circuits 7. Further, the first extractionelectrodes 103 and the third extraction electrodes 105 are placed on thesemiconductor circuits 7 ((d)).

On the other hand, the vias 202 are formed in the protective substrate108 b ((e), (f)), and then, the first electrodes 101 to be connectedwith the vias 202 are placed at the top of the protective substrate 108b and connection electrodes 204 to be connected with the vias 202 areplaced at the bottom of the protective substrate 108 b, respectively((g)). Then, the insulating film 107 is provided to cover the firstelectrodes 101 placed at the top of the protective substrate 108 b((h)). The second electrodes 102 to be connected with the vias 202 areplaced on the top of the insulating film 107 and adhesive 206 is appliedto the bottom of the protective substrate 108 b ((i)). Finally, the topof the substrate 108 a and the bottom of the protective substrate 108 bare aligned and bonded ((j)). FIG. 17A(j′) is a longitudinal sectionalview taken along a line crossing the vias 202 which are connected withthe second electrodes 102, illustrating that the vias 202 which areconnected with the second electrodes 102 are connected with theconnection electrodes 204, the third extraction electrodes 105, thesemiconductor circuits 7, and the fourth extraction electrodes 106.

In the method illustrated in FIGS. 18A and 18B, the tactile sensepresenting electrode is made upward serially from a section of thesubstrate 108 a at the bottom ((a) to (h)). First, the second extractionelectrodes 104 and the fourth extraction electrodes 106 are placed onthe substrate 108 a ((a), (b)), and the semiconductor circuits 7 areplaced on a part of the second extraction electrodes 104 (c). Then, theinterlayer dielectric 109 is provided to cover the substrate 108 a, thesecond extraction electrodes 104, the fourth extraction electrodes 106,and the semiconductor circuits 7. Further, the first extractionelectrodes 103 and the third extraction electrodes 105 are placed on thesemiconductor circuits 7 ((d)).

Then, an insulating layer 108 c is provided to cover the firstextraction electrodes 103 and the third extraction electrodes 105 ((e)).At this time, holes for the vias 202 are properly made above the secondextraction electrodes 104, the semiconductor circuits 7, and the firstextraction electrodes 103. After the insulating layer 108 c is provided,the vias 202 to be connected with the semiconductor circuits 7 and thelike are placed and the first electrodes 101 to be connected with thevias 202 are placed ((f)). The insulating film 107 is provided to coverthe first electrodes 101 and the insulating layer 108 c ((g)). Finally,the second electrodes 102 to be connected with the vias 202 are placedon the top of the insulating film 107 ((h)). FIG. 18A(h′) is alongitudinal sectional view taken along a line crossing the vias 202which are connected with the second electrodes 102, illustrating thatthe vias 202 which are connected with the second electrodes 102 areconnected with the third extraction electrodes 105, the semiconductorcircuits 7, and the fourth extraction electrodes 106.

(Abstract of One Aspect according to the Invention)

(1) A tactile sense presentation device in accordance with the firstaspect of the invention comprises:

a plurality of first electrodes covered with an insulating film andarranged on a same plane;

a plurality of second electrodes arranged on the plane with tops exposedto outside; and

a control unit performing a first operation in parallel with a secondoperation, wherein the first operation is for applying temporallychanging first voltages to a part of the plurality of first electrodesto generate electric fields which are changed by the part of theplurality of first electrodes, and the second operation is for applyingtemporally changing first electric currents to a part of the pluralityof second electrodes to cause the electric currents to flow from thepart of the plurality of second electrodes to second electrodes whichare different from the part of the plurality of second electrodes viaelectric conductors.

Herein, the above control unit is the data processing unit 50 forcontrolling respective components which configure the tactile sensepresentation device and external devices by processing the input signalsand data and outputting respective control signals and control data. Thedata processing unit 50 controlling “the first operation” and “thesecond operation” etc. can be realized based on cooperatively working bya processor and programs on a memory. The data processing unit 50 may berealized by a hard-wired device capable of providing functions accordingto the embodiment.

The electrostatic tactile sense presenting electrodes, providing anelectrostatic force, are capable of presenting imitational feels ofgranularity and smoothness. On the other hand, the electric currenttactile sense presenting electrodes, providing electric currentstimulation, are capable of presenting an imitational feel of roughnessof steps. The tactile sense presentation device according to this aspectprovided with a combination of a great number of these electrodes whichare fine electrodes is capable of presenting elaborate tactile senseswith mixed feels of granularity and roughness.

(2) A tactile sense presentation device in accordance with the secondaspect of the invention may be the tactile sense presentation device inaccordance with the first aspect of the invention wherein

the control unit performs a third operation and the first operation in atime sharing manner or a space sharing manner, and

the third operation is for applying temporally changing second voltagesto a part of the plurality of first electrodes to detect voltagesgenerated in at least another part of the rest of the part of theplurality of first electrodes under the second voltage applied state andto detect positions of dielectrics which are in the vicinity of thetactile sense presentation device based on the detected voltages.

As a result, the tactile sense presentation device can provideelectrodes which carry out both of an electrostatic tactile sensepresenting function and a touch sensor function. Thereby the wholeconfiguration of the tactile sense presentation device can be downsizedand simplified.

(3) A tactile sense presentation device in accordance with the thirdaspect of the invention may be the tactile sense presentation device inaccordance with the first aspect of the invention wherein

the control unit performs a fourth operation and the second operation ina time sharing manner or a space sharing manner, and

the fourth operation is for applying temporally changing third voltagesto a part of the plurality of second electrodes to detect voltagesgenerated in at least another part of the rest of the part of theplurality of second electrodes under the third voltage applied state andto detect positions of dielectrics which are in the vicinity of thetactile sense presentation device based on the detected voltages.

As a result, the tactile sense presentation device can provideelectrodes which carry out both of an electric current tactile sensepresenting function and a touch sensor function. Thereby the wholeconfiguration of the tactile sense presentation device can be downsizedand simplified.

(4) A tactile sense presentation device in accordance with the fourthaspect of the invention may be the tactile sense presentation device inaccordance with any one of the first to third aspects of the inventionwhich comprises:

a substrate which is an insulator;

the plurality of first electrodes covered with an insulating film andarranged on a same plane which is parallel with a main surface of thesubstrate;

the plurality of second electrodes arranged on the plane with topsexposed to outside;

a plurality of first extraction electrodes electrically connecting theplurality of first electrodes with the control unit and arranged on aplane which is parallel with the main surface of the substrate; and

a plurality of second extraction electrodes electrically connecting theplurality of second electrodes with the control unit and arranged on theplane which is parallel with the main surface of the substrate.

As a result, the tactile sense presentation device can provideelectrodes which carry out all of an electrostatic tactile sensepresenting function, an electric current tactile sense presentingfunction and a touch sensor function. Thereby the whole configuration ofthe tactile sense presentation device can be downsized and simplified.

(5) A tactile sense presentation device in accordance with the fifthaspect of the invention may be the tactile sense presentation device inaccordance with the fourth aspect of the invention characterized in thatthe substrate,

the plurality of first electrodes,

the plurality of second electrodes,

the insulating film,

the plurality of first extraction electrodes, and

the plurality of second extraction electrodes

are made of a transparent material.

As a result, the tactile sense presentation device can provideelectrodes which carry out all of an electrostatic tactile sensepresenting function, an electric current tactile sense presentingfunction and a touch sensor function. Thereby the whole configuration ofthe tactile sense presentation device can be downsized and simplified.

(6) A tactile sense presentation device in accordance with the sixthaspect of the invention may be the tactile sense presentation device inaccordance with the fifth aspect of the invention characterized bypresenting a tactile sense corresponding to an image as superimposed onthe image.

(7) A tactile sense presentation method in accordance with the seventhaspect of the invention comprises:

arranging a plurality of first electrodes covered with an insulatingfilm on a same plane;

arranging a plurality of second electrodes on the plane with topsexposed to outside; and

performing a first operation in parallel with a second operation,wherein the first operation if for applying temporally changing firstvoltages to a part of the plurality of first electrodes to generateelectric fields which are changed by the part of the plurality of firstelectrodes, and the second operation is for applying temporally changingfirst electric currents to a part of the plurality of second electrodesto cause the electric currents to flow from the part of the plurality ofsecond electrodes to second electrodes which are different from the partof the plurality of second electrodes via electric conductors.

The electrostatic tactile sense presenting electrodes, providing anelectrostatic force, are capable of presenting imitational feels ofgranularity and smoothness. On the other hand, the electric currenttactile sense presenting electrodes, providing electric currentstimulation, are capable of presenting imitational feel of roughness ofsteps. The tactile sense presentation method according to this aspectusing a combination of a great number of these electrodes which are fineelectrodes is capable of presenting elaborate tactile senses with mixedfeels of granularity and roughness.

(8) A tactile sense presentation method in accordance with the eighthaspect of the invention may be the tactile sense presentation method inaccordance with the seventh aspect of the invention, further comprising

performing a third operation and the first operation in a time sharingmanner or a space sharing manner, wherein the third operation is forapplying temporally changing second voltages to a part of the pluralityof first electrodes to detect voltages generated in at least anotherpart of the rest of the part of the plurality of first electrodes underthe second voltage applied state and to detect positions of dielectricswhich are in the vicinity of a tactile sense presentation device basedon the detected voltages.

As a result, the tactile sense presentation method can provideelectrodes which carry out both of an electrostatic tactile sensepresenting function and a touch sensor function. Thereby the wholeconfiguration of the device performing the tactile sense presentationmethod can be downsized and simplified.

(9) A tactile sense presentation method in accordance with the ninthaspect of the invention may be the tactile sense presentation method inaccordance with the eighth aspect of the invention, further comprising

performing a fourth operation and the second operation in a time sharingmanner or a space sharing manner, wherein the fourth operation is forapplying temporally changing third voltages to a part of the pluralityof second electrodes to detect voltages generated in at least anotherpart of the rest of the part of the plurality of second electrodes underthe third voltage applied state and to detect positions of dielectricswhich are in the vicinity of the tactile sense presentation device basedon the detected voltages.

As a result, the tactile sense presentation method can provideelectrodes which carry out both of an electric current tactile sensepresenting function and a touch sensor function. Thereby the wholeconfiguration of the device performing the tactile sense presentationmethod can be downsized and simplified.

INDUSTRIAL APPLICABILITY

The tactile sense presentation device with a touch panel functionaccording to the present disclosure can be applied to personal digitalassistants such as smart phones and smart pads, operation panels forautomobiles and home appliances, and guide plates for the visuallyimpaired and the like.

DESCRIPTION OF REFERENCE CHARACTERS

-   2 tactile sense presentation device with touch panel function-   4 electrostatic tactile sense presenting electrode-   6 electric current tactile sense presenting electrode-   7 semiconductor circuit-   21 Y-direction select line (touch drive)-   22 Y-direction select line (tactile sense-positive)-   23 Y-direction select line (touch sense)-   24 Y-direction select line (tactile sense-negative)-   31 drive line (touch drive)-   32 X-direction select line (touch drive)-   33 drive line (tactile sense-positive)-   34 X-direction select line (tactile sense-positive)-   35 drive line (touch sense)-   36 X-direction select line (touch sense)-   37 drive line (tactile sense-negative)-   38 X-direction select line (tactile sense-negative)-   50 data processing unit-   52 electrostatic tactile sense driver unit-   54 electric current tactile sense driver unit-   56 external image display unit-   58 external contact sensing unit-   60 electrostatic contact sensing unit-   101 first electrode-   102 second electrode-   103 first extraction electrode-   104 second extraction electrode-   105 third extraction electrode-   106 fourth extraction electrode-   107 insulating film-   108 a substrate-   108 b protective substrate-   108 c insulating layer-   109 interlayer dielectric-   110 dielectric-   111 positive electrostatic interaction electrode-   112 negative electrostatic interaction electrode-   113 voltage source-   114 electric conductor-   115 positive electric current interaction electrode-   116 negative electric current interaction electrode-   117 current source-   202 via-   204 connection electrode-   206 adhesive

1-9. (canceled)
 10. A tactile sense presentation device, comprising: aplurality of first electrodes covered with an insulating film andarranged on a same plane; a plurality of second electrodes arranged onthe plane with tops exposed to outside; and a control unit performing afirst operation in parallel with a second operation and performing athird operation, wherein the first operation is for applying temporallychanging first voltages to a part of the plurality of first electrodesto generate electric fields which are changed by the part of theplurality of first electrodes, and the second operation is for applyingtemporally changing first electric currents to a part of the pluralityof second electrodes to cause the electric currents to flow from thepart of the plurality of second electrodes to second electrodes whichare different from the part of the plurality of second electrodes viaelectric conductors, and wherein the third operation is for applyingtemporally changing second voltages to a part of the plurality of firstelectrodes to detect voltages generated in at least another part of therest of the part of the plurality of first electrodes under the secondvoltage applied state and to detect positions of dielectrics which arein the vicinity of the tactile sense presentation device based on thedetected voltages.
 11. The tactile sense presentation device accordingto claim 10, wherein the control unit performs the third operation andthe first operation in a time sharing manner or a space sharing manner.12. The tactile sense presentation device according to claim 10, whereinthe control unit performs a fourth operation and the second operation ina time sharing manner or a space sharing manner, and the fourthoperation is for applying temporally changing third voltages to a partof the plurality of second electrodes to detect voltages generated in atleast another part of the rest of the part of the plurality of secondelectrodes under the third voltage applied state and to detect positionsof dielectrics which are in the vicinity of the tactile sensepresentation device based on the detected voltages.
 13. The tactilesense presentation device according to claim 12, comprising: a substratewhich is an insulator; the plurality of first electrodes covered with aninsulating film and arranged on a same plane which is parallel with amain surface of the substrate; the plurality of second electrodesarranged on the plane with tops exposed to outside; a plurality of firstextraction electrodes electrically connecting the plurality of firstelectrodes with the control unit and arranged on a plane which isparallel with the main surface of the substrate; and a plurality ofsecond extraction electrodes electrically connecting the plurality ofsecond electrodes with the control unit and arranged on the plane whichis parallel with the main surface of the substrate.
 14. The tactilesense presentation device according to claim 13, characterized in thatthe substrate, the plurality of first electrodes, the plurality ofsecond electrodes, the insulating film, the plurality of firstextraction electrodes, and the plurality of second extraction electrodesare made of a transparent material.
 15. The tactile sense presentationdevice according to claim 14, characterized by presenting a tactilesense corresponding to an image as superimposed on the image.
 16. Atactile sense presentation method, comprising: arranging a plurality offirst electrodes covered with an insulating film on a same plane;arranging a plurality of second electrodes on the plane with topsexposed to outside; performing a first operation in parallel with asecond operation, wherein the first operation if for applying temporallychanging first voltages to a part of the plurality of first electrodesto generate electric fields which are changed by the part of theplurality of first electrodes, and the second operation is for applyingtemporally changing first electric currents to a part of the pluralityof second electrodes to cause the electric currents to flow from thepart of the plurality of second electrodes to second electrodes whichare different from the part of the plurality of second electrodes viaelectric conductors; and performing a third operation, wherein the thirdoperation is for applying temporally changing second voltages to a partof the plurality of first electrodes to detect voltages generated in atleast another part of the rest of the part of the plurality of firstelectrodes under the second voltage applied state and to detectpositions of dielectrics which are in the vicinity of a tactile sensepresentation device based on the detected voltages.
 17. The tactilesense presentation method according to claim 16, further comprisingperforming the third operation and the first operation in a time sharingmanner or a space sharing manner.
 18. The tactile sense presentationmethod according to claim 16, further comprising performing a fourthoperation and the second operation in a time sharing manner or a spacesharing manner, wherein the fourth operation is for applying temporallychanging third voltages to a part of the plurality of second electrodesto detect voltages generated in at least another part of the rest of thepart of the plurality of second electrodes under the third voltageapplied state and to detect positions of dielectrics which are in thevicinity of the tactile sense presentation device based on the detectedvoltages.